Nano-motion control

ALIO Industries is an innovator in nanotechnology motion systems. Alio designs and manufactures proprietary robotic devices that enable precise nano-scale movement. Holding several patents in the field of nano-motion control, ALIO sets the standards for nano-precision design and systems.

ALIO linear stages are unequalled in performance and reliability. ALIO’s mechanical bearing stages perform better than competing air-bearing stages. ALIO’s 6-D Nano Precision™ technology keeps ALIO on the leading edge.

Alio 6-D Nano Positioning™ air-bearing motion systems are offered for a wide range of applications in manufacturing, inspection/repair and metrology, PV, Semiconductor, Ink Jet Deposition, Lithography and Optical Inspection.

ALIO Z-Lift and Vertical Axis Motion Systems eliminate the inaccuracies of current Z-Wedge vertical stages and reduce the footprint and improve performance of vertical linear stages.

TRUE NANO™ precision rotary stages exceed current technical requirements for high precision rotary motion. Alio builds these stages for atmospheric as well as UHV vacuum applications.

ALIO is a world leader in nano-precision vacuum stage and robotic systems. Linear, rotary, open center X-Y, Hexapods, Tripods and goniometer stages are available in HV (10-7 TORR) or UHV (10-10 TORR) with ultra-low outgassing components.

ALIO patented the first True Nano™ precision Hexapod and Tripod robots. The ALIO Hexapod has been the standard for the most demanding applications in photonics, packaging, micro machining, measurement, medical and semiconductor manufacturing.

ALIO Industries adds value by customizing its core technology to fit our customer’s needs. We can customise any of our motion products to meet your specific needs.