ALIO Industries cutting-edge 6-D Nano Positioning™ air-bearing motion stages are available for a wide range of applications in manufacturing, inspection and metrology. With several patent pending designs, ALIO is the ideal choice for next-generation applications in photovoltaics, semiconductor, inkjet deposition, lithography and optical inspection.
Planar Air Bearing System: Patent pending 2-axis planar air-bearing system sets a new landmark in the world of 6-D Nano Positioning™. With an impressive X&Y travel range from 300 mm to over 3 meters, this product family has simply no equal. NIST traceable laser data guarantees True Nano™ precision in all 6 degrees of freedom, across the entire travel range. Expect standard flatness of < 1 µm/meter with less than < 1 arc second of pitch, yaw and roll. Standard repeatability is < 60 nm, and 10 nm repeatability is offered as an option.
Linear Air Bearings: Single axis linear air bearings are available in horizontal or vertical orientation as shown. The linear product family of air bearings uses non-iron linear servo motors with variable forces depending on customer needs. Travel range is from 25 mm to 3 meters of travel.
NANO Z™: Increased demands for True NANO™ metrology led ALIO to design the NANO Z™ Z lift air-bearing stage. This Z stage solves all past design issues of tip and tilt, while increasing the accuracy to more than 100 nm using standard Renishaw Invar encoders. The counterbalanced NANO Z™ can easily hold heavy vacuum wafer chucks and still provide nano-precision over 24 mm of travel.
Rotary Air Bearing Stages and Spindles: ALIO’s nano precision rotary air bearing product family offers travel ranges of 100mm and more, and come with variable torque options to meet a broad range of applications. This growing product line has excellent axial and radial run-out specifications for extreme precision needs.