All ALIO products with exception of the air bearing systems, are UHV compatible. Linear, rotary, open center X-Y, Hexapods, Tripods and goniometer stages and systems are available in HV (10-7 TORR) or UHV (10-10 TORR) with ultra-low outgassing material and components all carefully prepared and baked.
Nano-positioning applications have demanding requirements that are further complicated when the management of motion is under vacuum or when requiring extended travel, finer repeatability, higher speed, greater uptime and of course, lower cost.
The challenges of engineering and selecting components that must work together in perfect harmony to achieve nanometer precision are considerable. The drive mechanism, bearings, feedback system, motion controller, kinematic structure are perfectly designed to provide nanometer precision in vacuum environments.
